Lectures (Video)
- 1. Introduction - processes and variation framework
- 2. Semiconductor process variation
- 3. Mechanical process variation
- 4. Probability models of manufacturing processes
- 5. Sampling and sampling distributions
- 6. Statistical interference and the Shewhart hypothesis
- 7. SPC methods and process capability
- 8. Advanced SPC: moving average approaches
- 9. Yield modeling and attribute statistics
- 10. Multivariate SPC
- 11. Process causality, analysis of variance and regression analysis
- 12. Full factorial models
- 13. Modeling testing and fractional factorial models
- 14. Fractional factorial models and higher order models
- 15. Quadratic models and response surfaces
- 16. Response surface methods - process robustness
- 17. Nest variance problems
- 18. Sequential experimentation
- 19. Case study 1: Tungsten CVD optimization
- 20. Case study 2: cycle to cycle control
- 21. Case study 3: spatial and temporal RSMs in IC manufacturing
- 22. Case study 4: DOE for multicavity molds
Control of Manufacturing Processes
Course Summary
This course is based on 2.830J / 6.780J / ESD.63J Control of Manufacturing Processes, Spring 2008 made available by Massachusetts Institute of Technology: MIT OpenCourseWare under the Creative Commons BY-NC-SA license.
This course explores statistical modeling and control in manufacturing processes. Topics include the use of experimental design and response surface modeling to understand manufacturing process physics, as well as defect and parametric yield modeling and optimization. Various forms of process control, including statistical process control, run by run and adaptive control, and real-time feedback control, are covered. Application contexts include semiconductor manufacturing, conventional metal and polymer processing, and emerging micro-nano manufacturing processes.
Reading Material
1. Textbook: Introduction to Statistical Quality ControlMontgomery, Douglas C. Introduction to Statistical Quality Control. 5th ed. New York, NY: Wiley, 2004. ISBN: 9780471656319.
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2. Textbook: Fundamentals of Semiconductor Manufacturing and Process Control
May, Gary S., and Costas J. Spanos. Fundamentals of Semiconductor Manufacturing and Process Control. Hoboken, NJ: Wiley-Interscience, 2006. ISBN: 9780471784067.
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Course Material
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