Lectures
- 1. Introduction to MEMS
- 2. Microfabrication for MEMS II
- 3. Microfabrication for MEMS III
- 4. Microfabrication for MEMS IV
- 5. Fabrication for the life sciences
- 6. Elasticity
- 7. Structures
- 8. Lumped-element modeling
- 9. Energy-conserving transducers
- 10. Dynamics
- 11. Structures special topics
- 12. Thermal energy domain
- 13. Modeling dissipative processes
- 14. Fluids 1
- 15. Fluids 2
- 16. Mass transport in liquids
- 17. Feedback
- 18. Noise
- 19. Packaging
- 20. Design problem
- 21. Design tradeoffs
- 22. Power MEMS case study
- 23. Optical MEMS case study
- 24. Capacitive accelerometer case study
- 25. BioMEMS case study
Design and Fabrication of Microelectromechanical Devices
Course Summary
This course is based on 6.777J / 2.372J Design and Fabrication of Microelectromechanical Devices, Spring 2007 made available by Massachusetts Institute of Technology: MIT OpenCourseWare under the Creative Commons BY-NC-SA license.
This course is an introduction to microsystem design. Topics covered include: material properties, microfabrication technologies, structural behavior, sensing methods, fluid flow, microscale transport, noise, and amplifiers feedback systems. Student teams design microsystems (sensors, actuators, and sensing/control systems) of a variety of types, (e.g., optical MEMS, bioMEMS, inertial sensors) to meet a set of performance specifications (e.g., sensitivity, signal-to-noise) using a realistic microfabrication process. There is an emphasis on modeling and simulation in the design process.
Reading Material
1. Textbook (MIT): Microsystem DesignSenturia, Stephen D. Microsystem Design. New York, NY: Springer, 2004. ISBN: 9780792372462.
